ADTEC AMVG-5000-RW Automatic RF Impedance Matching Unit 5kW 13.56MHz

ADTEC Plasma Technology AMVG-5000-RW Automatic Impedance Matching Unit for industrial RF plasma and semiconductor processing applications.

The unit is rated for a maximum RF power input of 5000 W at 13.56 MHz with a nominal impedance of 50 ohms. It is designed to provide automatic impedance matching between a compatible RF generator and plasma process load.

Specifications shown on the unit:

• Manufacturer: ADTEC Plasma Technology Co., Ltd.
• Model: AMVG-5000-RW
• Maximum RF power input: 5000 W
• Frequency: 13.56 MHz
• Nominal impedance: 50 Ω
• Mains supply: AC 100 V, 50–60 Hz
• Power consumption: 30 VA typical, 50 VA maximum
• Cooling-water flow: more than 2.0 liters/minute
• Maximum cooling-water pressure: 0.5 MPa
• Cooling-water temperature: 10–35 °C
• Approximate weight: 10 kg
• Serial number: 10311100229
• Made in Japan

Connections visible on the unit include RF-IN, AC-IN, REMOTE, I/F, grounding and cooling-water connections.

Testing and condition:

The unit has not been connected to AC power, an RF generator, plasma chamber, cooling-water system or external controller. No functional or RF-performance testing has been performed. Automatic tuning, communication, internal components and calibration status are unknown.

One small multi-wire connector is disconnected and remains in the condition shown in the photographs. The aluminum enclosure has ordinary scratches and handling marks but no major external damage is visible.

Included:

• ADTEC AMVG-5000-RW matching unit only
• Installed fan and water fittings shown in the photographs

Not included:

• AC power cable
• RF generator
• RF cables or adapters
• Remote controller
• Interface or communication cables
• Cooling-water hoses
• Manuals, software or additional accessories

The buyer will receive the exact unit shown. Compatibility and required connections must be verified by the buyer before purchase.

Shipping Notice: This item ships via freight due to its size/weight, so the exact cost depends on your delivery location. For the most accurate shipping cost, please use “Make Offer” or message us with your delivery location before ordering — we will calculate the exact freight cost and confirm it with you first. If you use “Buy It Now” instead, the shipping charge shown at checkout is a placeholder covering the maximum possible freight cost to any destination worldwide; we will calculate your actual cost after the order and refund you the difference.